MS311 - 14 hours
Learning objectives
Provide RF principles diagnostic methods for generators, matches and plasma.
A theoretical and practical approach consistent with the use of existing process equipment installed at our facilities.
Who will benefit most ?
Technicians and engineers with knowledge in electronics and on plasma requirements.
Innovative teaching resources
Lectures and «hands-on» exercises.
Custom training manual.
Prior interview with the trainees possible in order to qualify their needs.
Multiple choice questions at the start and end of the training.
Price per person
Please, contact us.
Each session is limited to 6 trainees.
Dates & location
Training Department : +33(0)4 76 84 40 30
Can be also held in your premises for a specific training.
In charge of the training session
Manuel LEBE From 40-30 Engineering Department, who has developed the RF activity since 2001.
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Program
1. Prerequisites
Reminder of the different dimensions in electronics that are essential for the remainder of the course.
2. Impedance adaptation
Theoretical module which covers the issues of energy transfer in Radiofrequency, the concept of reflected power, and the use of the Smith chart.
3. RF Match
The key to energy transfer, detailed view of the different models and design choices.
Implementation of energy transfer issues for high RF currents, etc.
4. Skin effect
Highlighting of the effects and limitations due to highfrequency currents and materials.
5. RF Cables
Theory, issues, cable choice, power resistance andcut-off frequency.
6. RF generator
Detailed analysis of the components of an RF generator.
Fault analysis.
Specification analysis.
7. RF microwave generator
Cavity magnetron preventive maintenance.
8. Metrology and diagnosis
This module describes the implementation of RF measuring equipment in the context of etching and deposition equipments. Fault diagrams are analyzed.
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