Troubleshooting on vacuum pumping systems 

MS714  - 21 hours

TRAINING OBJECTIVES

To understand the fundamental concepts of vacuum physics.
To gain insight into pressure measurement and leak detection techniques (helium methodology).
To provide a reliable Helium Leak Detection and good interpretation of results.
To get a better understanding of the applications and processes involving vacuum technology.
Assuring the exploitation and maintenance of the vacuum parts of an equipment.

 

AUDIENCE

Operators, technicians and engineers working on coat-ing, etching, ionic implantation, thermal treatment equipment.

 

INNOVATIVE TEACHING RESOURCES

This training will allow you to understand vacuum, how to reach and measure it. The length and content of the course can be easily adjusted to yours needs and expectations: leak detectors, pumps, vacuum produc-tion, outgassing.

 

IN CHARGE OF THE TRAINING SESSION

Michel THIAM : PhD in Physics (Strong Experience in Surface Physics and Surface Chemistry under UHV Conditions), from 40-30 Engineering Department, certi-fied NDT Leak detection level 2.

 

PRICE PER PERSON

Please, contact us.

 

DATES & LOCATION

Training Department : +33(0)4 76 84 40 30

Can be also held in your premises for a specific training.

PROGRAM

1. Introduction of the principles of Vacuum Physics
▪ Creating Vacuum.
▪ The concept of pressure.

2. Creating Vacuum – pumping systems
▪ Pumping Principles: Mechanical Rotary pumps,Roots Boosters, Turbo molecular pumps...
▪ Recognizing and categorizing symptoms of pumping failures

3. Pressure measurement
▪ The Bourdon Gauge
▪ The Capacitance Gauge
▪ The Pirani gauge
▪ The Penning gauge
▪ The Bayard- Alpert gauge
▪ The cell analyser
Principles of measurement and gauge settings

4. Operation and use of connecting elements
▪ Types of existing elements.
▪ Choice of parts and assembly for optimal vacuum.
▪ Notions of baking and ultra-high vacuum.
▪ Gasket seals
▪ Flanges.

5. Hands-on exercises
▪ Maintenance practice and diagnosis of symptoms announcing a malfunction on a piece of equipment.
▪ Leak detection
The leak detection method to be used will be dis-cussed by the trainee and the trainer.

6. Analysis of situations faced by the clients
▪ ½ day in the client’s premises
▪ Questions/ Answers
▪ Leak testing practice
▪ Practical Applications